In this course, you'll explore the fascinating world of microfabrication and Micro Electromechanical Systems (MEMS). Led by Dr. Chang Liu, who brings a wealth of academic and industrial experience, you'll gain insights into how essential devices like sensors and integrated circuits are made, along with a look at the technologies that underpin their production. By examining the processes involved in creating these tiny, vital components, you'll come away with a solid understanding of their applications in modern technology.
What you'll learn
understand semiconductor materials and their electronic properties
explore mechanical properties of semiconductor materials and thin films
learn about semiconductor wafer processing technology
gain knowledge of silicon micromachining processes
familiarize with MEMS foundry production and cleanroom processing
analyze the cost factors in MEMS production
Course objectives
provide a survey of MEMS and microfabrication technology
explain the practical applications of MEMS in various industries
discuss the future role of MEMS in robotics and IoT devices